
A Comprehensive Comparison for Advanced Applications
Microscopy plays a vital role in comprehending the properties of materials across various applications and length scales. It is essential for engineers and operators to carefully select from a wide array of different modalities. A selection of complementary techniques is often critical for addressing challenges in material characterization, packaging development and semiconductor failure analysis. ZEISS can certainly help in this respect as we are a leading supplier of both 2D and 3D microscopy techniques, including non-destructive imaging solutions.
While ZEISS 3D X-ray imaging, conventional 2D characterization techniques, and 3D conventional techniques like Focused Ion Beam Scanning Electron Microscopy (FIBSEM) offer valuable insights, ZEISS 3D X-ray solutions provide distinct advantages that make it a great addition to your suite of instruments for these advanced markets. This blog post will compare these technologies, highlighting their strengths and weaknesses in the context of modern applications, particularly in defect inspection across a wide variety of electronic samples.
Complementary Role in Failure Analysis
Conventional 3D techniques like FIB are great and highly useful in semiconductor failure analysis. This is complemented by ZEISS 3D X-ray by providing additional information. The non-destructive nature of 3D X-ray imaging allows for the examination of internal structures without altering the sample, thereby enhancing the overall understanding of material integrity and failure mechanisms. Non-destructive 3D imaging allows microscopists to identify regions of interest or potential points of failure without cutting the sample. This combination is particularly beneficial in the semiconductor industry, where understanding the root causes of failures can lead to improved designs and manufacturing processes.
Electronics Applications

Smartphone-power management-ic-interconnects-3d-xrm-cross-section.
Power Electronics
In power electronics, the reliability and efficiency of semiconductor devices are paramount. ZEISS 3D X-ray imaging allows for the non-destructive testing (NDT) and inspection of solder joints, wire bonds, and internal connections in power modules. This capability helps identify defects such as voids or cracks that could lead to failure under high-stress conditions.
FIB techniques, including Focused Ion Beam Scanning Electron Microscopy (FIBSEM), can then be used to perform detailed analysis on specific areas of interest, providing high-resolution insights into the microstructural integrity of these components. The combination of non-destructive imaging and failure analysis ensures that potential issues are addressed early in the design and manufacturing processes, ultimately enhancing the performance and longevity of power electronic devices.

A12-A14 Chip Package
Artificial Intelligence (AI)
As AI applications demand increasingly complex semiconductor architectures, the need for precise characterization of electronic packages becomes critical. ZEISS 3D X-ray imaging can visualize the intricate interconnections and packaging of AI chips, allowing engineers to assess the integrity of multi-layer designs without damaging the samples.
This is particularly important in AI hardware, where performance can be severely impacted by even minor defects. FIB techniques, including Focused Ion Beam Scanning Electron Microscopy (FIBSEM), can complement this by enabling localized analysis of specific features, such as interconnects and vias, providing additional context for any observed anomalies in the failure analysis process.

DRAM package sample – Metal lines and small submicron features are clearly resolved with greater certainty with the 40X-P objective
Memory
In memory devices, such as DRAM and NAND flash, the density of components continues to increase, making defect detection more challenging. ZEISS 3D X-ray imaging facilitates the examination of internal structures, enabling the identification of defects that could affect performance, such as incomplete etching or material delamination.
The non-destructive testing (NDT) nature of this imaging allows for the assessment of multiple samples in a single run, enhancing throughput. FIB can then be employed to analyze specific memory cells in detail, allowing for targeted investigations into failure mechanisms and improving the overall reliability of memory devices.

The workflow detail of the hybrid bond case study. a) move the SEM sample stage to the target hybrid bond. b) SEM Pt deposition. c) the SEM micrograph shows the opening defect between the Cu bonds
on the target interconnectors. d) X-ray image validated that the target hybrid bond was FIB cross-sectioned.
Packaging
The packaging of semiconductor devices is crucial for performance and reliability. ZEISS 3D X-ray imaging provides insights into the integrity of the packaging, including the quality of encapsulation and the presence of voids or delamination. This is essential for ensuring that devices can withstand environmental stresses.
FIB techniques can further enhance this analysis by allowing for the preparation of cross-sections of packaged devices, enabling detailed examination of the interfaces between different materials. This combination of non-destructive imaging and defect inspection plays a vital role in ensuring the longevity and functionality of packaged semiconductor devices.

Non-destructive 3D X-ray imaging of camera module acquired at 18 µm/voxel resolution shows CMOS imaging sensor and other mechanical components.
Photonics
For photonics applications, such as integrated photonic circuits and optical devices, the ability to visualize internal structures and interfaces is critical. ZEISS 3D X-ray imaging can help in assessing the quality of photonic waveguides, lenses, and other components, ensuring that they meet the stringent requirements for light transmission and manipulation.
FIBSEM can be utilized to create cross-sections of photonic devices, providing valuable information about layer thicknesses and material interfaces, which are crucial for optimizing device performance. The integration of non-destructive microscopy techniques and advanced imaging technologies enhances the overall effectiveness of photonics development.
Overview of Conventional 2D Characterization Techniques
What are Conventional 2D Techniques?

Flip-chip solder bump shows material contrast, channeling contrast of grain structure, and adhesion. Inset: Failure at the UBM RDL interface. Imaged with GeminiSEM FE-SEM.
Conventional 2D characterization techniques include methods such as optical microscopy, scanning electron microscopy (SEM), and transmission electron microscopy (TEM). These methods provide valuable information about the surface and structure of materials but have limitations.
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- Established Techniques: 2D methods are well-established and widely used in various industries, making them accessible and familiar to many researchers and engineers.
- High Resolution: Techniques like SEM and TEM can achieve high-resolution imaging, allowing for detailed examination of surface features and microstructures.
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- Limited Depth Information: 2D techniques provide only surface information, which can lead to an incomplete understanding of the internal structure of materials. This limitation can result in missed defects or features that are critical to performance.
- Sample Preparation: Many 2D techniques require extensive sample preparation, which can introduce artifacts and alter the material being analyzed.
Overview of 3D Conventional Techniques: Focused Ion Beam (FIBSEM)
What is Focused Ion Beam Scanning Electron Microscopy (FIBSEM)?

Close up of 2.5D package cross section shows grain structure and solder crack in 20 µm microbump
Focused Ion Beam Scanning Electron Microscopy (FIBSEM) is a 3D imaging and milling technique that uses a focused beam of ions to analyze and modify materials at the micro and nano scales. FIB can perform serial sectioning of samples to create high-resolution images of internal structures. FIBSEM is also used in lamella preparation, which involves thinning a sample to electron transparency for subsequent imaging using Scanning Transmission Electron Microscopy or STEM imaging using the Electron beam. FIBSEM is also utilized for 3D tomography, allowing for the reconstruction of 3D images from a series of 2D slices.
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- High Resolution: FIBSEM can achieve extremely high-resolution imaging, allowing for detailed examination of microstructures and defects.
- Material Modification: FIBSEM can not only image but also mill and modify materials, making it a versatile tool for both characterization and fabrication.
- Lamella Preparation: FIBSEM is particularly effective for preparing thin lamellae, which are essential for STEM imaging. This preparation allows for high-resolution imaging of internal structures at the atomic level.
- 3D Tomography: FIBSEM can be used to create 3D tomographic images by milling away layers of the sample and capturing images at each step, providing a detailed view of the internal structure.
- Localized Analysis: FIBSEM allows for targeted analysis of specific areas within a sample, providing detailed insights into localized features.
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- Destructive Technique: FIBSEM is inherently destructive, as it involves milling away material to obtain images. This can limit its use in applications where sample integrity is critical.
- Time-Consuming: The process of milling and imaging can be time-consuming, especially for complex samples or large areas.
Overview of 3D X-Ray Imaging
What is 3D X-Ray Imaging?

Slice view of a A12 chip package showing voids and cracks present on the solder bumps - imaged non-destructively on a ZEISS Versa XRM.
ZEISS 3D X-ray imaging, also known as X-ray computed tomography (CT), provides a non-destructive method for visualizing the internal structure of materials in three dimensions. This technology has gained popularity in various fields, including semiconductor manufacturing, materials science, and quality control.
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- True Volumetric Imaging: Unlike conventional 2D techniques, ZEISS 3D X-ray imaging provides true 3D representations of internal structures, allowing for detailed analysis of complex geometries and features.
- Comprehensive Internal Analysis: 3D X-ray imaging allows for the visualization of internal structures without the need for sample preparation, providing a complete view of the material's features, including defects, voids, and inclusions.
- Non-Destructive Testing: ZEISS 3D X-ray imaging preserves the integrity of the sample, enabling further analysis or testing after imaging.
- High Throughput: Modern ZEISS 3D X-ray systems can rapidly acquire data, enabling high-throughput analysis of multiple samples in a shorter time frame.
- Quantitative Data: 3D imaging provides quantitative data on the size, shape, and distribution of internal features, facilitating more accurate assessments of material properties.
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- Spatial Resolution: Spatial resolution with 3D X-Ray imaging is lower than that of FIBSEM tomography so cannot replace it as a technique completely. However, being able to identify areas with the X-Ray tool to then access using FIBSEM is a powerful complementary workflow.
Conclusion
While ZEISS 3D X-ray imaging, conventional 2D characterization techniques, and 3D conventional methods such as Focused Ion Beam Scanning Electron Microscopy (FIBSEM) each provide valuable insights for materials characterization, ZEISS 3D X-ray solutions play a complementary role in advanced applications within semiconductor manufacturing and electronic packaging.
The true volumetric imaging capabilities, non-destructive testing, high throughput, and quantitative analysis offered by ZEISS 3D X-ray systems enhance the overall effectiveness of these processes, making them an essential component for ensuring quality and performance in these rapidly evolving industries. As the demand for detailed characterization continues to increase, integrating advanced imaging technologies like ZEISS 3D X-ray will be vital for fostering innovation and maintaining competitiveness in the market.
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Fill out the short form below to download a collection of case studies showcasing innovative correlative workflow. Discover how 3D X-ray microscopy guides precise sample preparation with fs-laser integrated Ga FIB-SEM, cutting preparation and analysis time from days to hours. This compendium features recent publications and use cases for fault isolation and physical failure analysis.